Titanium nitride thin film is deposited on Si(111) substrate by DC reactive magnetron sputtering.
采用直流反应磁控溅射方法在Si(111)基底上沉积了氮化钛薄膜。
The results of this work are summarized as follow:1. We deposited ZnO films on different kinds of substrates by the method of RF magnetron sputtering.
主要研究工作和结论如下:1、采用射频反应磁控溅射的方法,在不同衬底上制备了ZnO薄膜。