The dicing kerfs have been reduced to below 20 um in many cases, with no chipping on either front or backside. 在很多情况下,刻划宽度可以小到20um,上下都没有碎屑。 blog.sina.com.cn
专业释义
电子、通信与自动控制技术
背面崩裂
And finally it introduces two effective methods to control backside chipping: Stress Relief Step Cutting and Dicing Before Grinding. 同时介绍了两种控制背面崩裂较有效的切割工艺:减少应力的开槽切割工艺和DBG工艺。